Semiconductor Application - Chemical Mechanical Polishing

Semiconductor Application - Chemical Mechanical Polishing (CMP)

Precise control of the swing arm position and polishing pad speed are critical for polishing wafers.

We provide motor and actuator solutions that are highly responsive and reliable to avoid polishing too much of the substrates away.

Common Requests

  • High torque
  • High inertia
  • Minimize footprint
  • Increase reliability
  • Increase responsiveness

Solutions

Suitable for Arm Rotation

AZ Series Stepper Motors with Mechanical Absolute Encoder

AZ Series Stepper Motors with Mechanical Absolute Encoder

  • Compact right-angle geared motor
  • Handles high inertial loads
  • Highly responsive and reliable αSTEP closed-loop technology

Suitable for Polishing

DGII Series Hollow Rotary Actuators

DGII Series Hollow Rotary Actuators

  • Powerful and rigid design
  • Large hollow bore diameter
  • Highly responsive and reliable αSTEP closed-loop technology


Engineering Notes
We're Here to Help

Service and Support

 

Business Hours:

Monday to Friday

8:30am EST to 5:00pm PST

 

Sales & Customer Service:

1-800-418-7903

Technical Support:

1-800-468-3982



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