Semiconductor Application - Wafer Handling Machine

Semiconductor Application - Wafer Handling Machine

Handling wafer presents unique challenges like moving high inertial loads precisely and delicately.

We offer solution for various motion axes in a wafer handling process such as the loading/unloading axis, the transfer process, and the alignment process.

Common Requests

  • Position precisely
  • Handling high inertial loads
  • Synchronous motion
  • Minimize footprint
  • Increase reliability

Solutions

Suitable for Wafer Transfer

AZ Series Stepper Motors with Mechanical Absolute Encoder

AZ Series Stepper Motors with Mechanical Absolute Encoder

  • High accuracy, non-backlash gear motor
  • Handles high inertial loads effectively
  • Highly responsive and reliable αSTEP closed-loop technology

Suitable for Wafer Alignment

DR/DRS2 Series Compact Electric Cylinders

DR/DRS2 Series Compact Electric Cylinders

  • Entire linear motion mechanism in a compact design
  • Highly responsive and reliable αSTEP closed-loop technology
  • Preassembled for quality and convenience


Videos
Engineering Notes
We're Here to Help

Service and Support

 

Business Hours:

Monday to Friday

8:30am EST to 5:00pm PST

 

Sales & Customer Service:

1-800-418-7903

Technical Support:

1-800-468-3982



©2024 - ORIENTAL MOTOR USA CORP. - All Rights Reserved