Industries > Semiconductor > Semiconductor Application - Wafer Handling Machine
Semiconductor Application - Wafer Handling Machine
Handling wafer presents unique challenges like moving high inertial loads precisely and delicately.
We offer solution for various motion axes in a wafer handling process such as the loading/unloading axis, the transfer process, and the alignment process.
Common Requests
- Position precisely
- Handling high inertial loads
- Synchronous motion
- Minimize footprint
- Increase reliability
Solutions
Suitable for Wafer Transfer
AZ Series Stepper Motors with Mechanical Absolute Encoder
- High accuracy, non-backlash gear motor
- Handles high inertial loads effectively
- Highly responsive and reliable αSTEP closed-loop technology
Suitable for Wafer Alignment
DR/DRS2 Series Compact Electric Cylinders
- Entire linear motion mechanism in a compact design
- Highly responsive and reliable αSTEP closed-loop technology
- Preassembled for quality and convenience
Videos
Engineering Notes
We're Here to Help
Business Hours:
Monday to Friday
8:30am EST to 5:00pm PST
Sales & Customer Service:
1-800-418-7903
Technical Support:
1-800-468-3982
