Semiconductor Application - Wafer Pin Lifter

Semiconductor Application - Wafer Pin Lifter

Lifting and lowering silicon wafers require precise and smooth motion in a compact design.  Precise handling minimizes tilting of the wafer, causing scratches or other damage to the wafers.

Compact electric cylinders can lift and lower wafers while minimizing footprint.  For heavier loads, multi-axis synchronized motion is possible with a multi-axis controller.

Common Requests

  • Position precisely
  • Minimize footprint
  • Minimize damage
  • Increase reliability
  • Synchronized motion

Solutions

Suitable for Precise Lifting and Lowering

DR/DRS2 Series Compact Electric Cylinders

DR/DRS2 Series Compact Electric Cylinders

  • Entire linear motion mechanism in a compact design
  • Highly responsive and reliable αSTEP closed-loop technology
  • Preassembled for quality and convenience

Suitable for Multi-axis Synchronized Motion

EtherCAT Compatible Multi-axis Controller

EtherCAT Compatible Multi-axis Controller

  • Minimize footprint for multiple drivers
  • EtherCAT compatibility
  • Available in 2-axis, 3-axis and 4-axis


Engineering Notes
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