Compact Multi-Axis Driver Installation to Reduce the Footprint of Semiconductor Manufacturing Equipment

Issue: To Achieve Both an Increase in the Number of Motor Axes and Downsizing of Equipment

Challenge:

In the manufacturing process of advanced semiconductors, the amount of equipment used tends to increase to accommodate miniaturization and multilayered structure. On the other hand, there is a limit to the equipment installation space, and in order to improve productivity in next-generation semiconductor manufacturing equipment, it is essential to achieve a reduction in the footprint of the equipment overall.

• It is Necessary to Increase the Number of Motor Axes on the Equipment Due to Process Increase or Process Change, but This Leads to Increased Driver and Wiring Space As Well as Man-Hours for Wiring
• Need to Downsize the Equipment As the Number of Equipment Installation Increases

Solution: Slim Type Multi-Axis Driver Save Space

AZ Series multi-axis driver slim type can control four axes of motors with a single unit and can reduce space significantly compared to existing multi-axis drivers.